| 摘要 |
A micromachined gyroscope is disclosed comprising a substrate, 3 masses m1, m2 and m3 , configured to oscillate along a first direction x or y, whereby the first mass m1 is mechanically coupled to the substrate, the second mass m2 is mechanically coupled to the first mass m1 and to substrate, and the third mass m3 is mechanically coupled to the second mass m2, whereby the weight and the spring constants k1, k2, k3 of the respective masses m1, m2 and m3 and mechanical couplings k12, k23 are selected, such that, during operation mass m2 oscillates at a frequency substantially above the resonance frequencies of mass m1 and mass m3. The resonance frequency of mass m2 may be at least 2 times, or even 2.5 times, higher than the resonance frequency of mass m1 or m3. |
