| 摘要 |
PURPOSE: A device for measuring a film thickness and a deposition device having the same are provided to minimize the contamination of a sensor by installing a barrel type shield in the front side of a device for measuring a film thickness, thereby maintaining the reliability of a film thickness measurement. CONSTITUTION: A device for measuring a film thickness comprises a film thickness measurer(41) and a barrel type shield(45). The film thickness measurer measures a state of materials evaporating from an evaporation source. The barrel type shield is installed in the front side of the film thickness measuring device, thereby inducing a part of the materials evaporating from the evaporation source to the film thickness measurer. |
