发明名称 |
MULTI-BEAM MODULATOR FOR A PARTICLE BEAM AND USE OF THE MULTI-BEAM MODULATOR FOR THE MASKLESS STRUCTURING OF A SUBSTRATE |
摘要 |
The invention discloses a multibeam modulator which generates a plurality of individual beams from a particle beam. The particle beam illuminates the multibeam modulator at least partially over its surface. The multibeam modulator comprises a plurality of aperture groups composed of aperture row groups. The totality of all aperture rows defines a matrix of m×n cells, where m cells form a row, and k openings are formed in each row. The density of openings within a row is inhomogeneously distributed. |
申请公布号 |
EP1812947(B1) |
申请公布日期 |
2013.03.20 |
申请号 |
EP20050804489 |
申请日期 |
2005.10.25 |
申请人 |
VISTEC ELECTRON BEAM GMBH |
发明人 |
DOERING, HANS-JOACHIM;HEINITZ, JOACHIM |
分类号 |
H01J37/317 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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