| 摘要 |
The invention provides the vacuum-pumping system. The vacuum-pumping system (10) has vacuum pump (20), (30), and pressure sensing device (50). The vacuum pump (20), (30) have two rotors, motor, timing gear, and bootstrap driver (26), (36). The vacuum-pumping system (10) has control section (60), the pressure sensing device (50) detects the pressure, and the bootstrap driver (26), (36) controls the rotating speed of rotors. |
