发明名称 |
Rapidly cleanable electroplating cup seal |
摘要 |
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
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申请公布号 |
US8398831(B2) |
申请公布日期 |
2013.03.19 |
申请号 |
US201113079745 |
申请日期 |
2011.04.04 |
申请人 |
GHONGADI SHANTINATH;RASH ROBERT;HAWKINS JEFF;VARADARAJAN SESHASAYEE;MAJID TARIQ;GANESAN KOUSIK;BUCKALEW BRYAN;EVANS BRIAN;NOVELLUS SYSTEMS, INC. |
发明人 |
GHONGADI SHANTINATH;RASH ROBERT;HAWKINS JEFF;VARADARAJAN SESHASAYEE;MAJID TARIQ;GANESAN KOUSIK;BUCKALEW BRYAN;EVANS BRIAN |
分类号 |
C25D17/00;C25D9/00;F16J15/00 |
主分类号 |
C25D17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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