发明名称 Method for arranging an optical module in a measuring apparatus and a measuring apparatus
摘要 A method for arranging an optical module in a measuring apparatus includes: providing the measuring apparatus with an irradiation system for irradiating the optical module with electromagnetic radiation, a reference component, and a detection element defining a detection surface, the detection element being disposed in a defined position in relation to the reference component, disposing the optical module in the measuring apparatus such that the radiation emitted by the irradiation system passes through the optical module and impinges onto the detection surface as an exit beam, measuring a position of the exit beam in relation to the detection surface, adjusting the position of the optical module within the measuring apparatus such that the position of the exit beam in relation to the detection surface is brought to correspond to a predetermined position, and establishing position parameters defining the position of the optical module in relation to the reference component.
申请公布号 US8400618(B2) 申请公布日期 2013.03.19
申请号 US20100706560 申请日期 2010.02.16
申请人 RATH MARTIN;MUELLER ULRICH;MIELKE WALDEMAR;CARL ZEISS SMT GMBH 发明人 RATH MARTIN;MUELLER ULRICH;MIELKE WALDEMAR
分类号 G03B27/32 主分类号 G03B27/32
代理机构 代理人
主权项
地址