发明名称 |
Method of manufacturing organic light emitting device and vapor deposition system |
摘要 |
Provided is a method of manufacturing an organic light emitting device including the step of forming an electron injection layer. The step of forming the electron injection layer includes the steps of: vaporizing in a container a dopant material as a raw material of a dopant; causing the vaporized dopant material to pass a heated medium between the container and the substrate; and forming the organic compound into the electron injection layer. According to the method the organic light emitting device which has high electron injection efficiency and can be driven at a low voltage can be obtained. |
申请公布号 |
US8398774(B2) |
申请公布日期 |
2013.03.19 |
申请号 |
US20060610022 |
申请日期 |
2006.12.13 |
申请人 |
OTSUKA MANABU;TOKUNAGA YUZO;MASHIMO SEIJI;YOSHIKAWA TOSHIAKI;FUKUDA NAOTO;CANON KABUSHIKI KAISHA |
发明人 |
OTSUKA MANABU;TOKUNAGA YUZO;MASHIMO SEIJI;YOSHIKAWA TOSHIAKI;FUKUDA NAOTO |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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