发明名称 Patterning Apparatus for Manufacturing Solar Cell
摘要 <p>PURPOSE: A patterning apparatus for manufacturing a solar cell is provided to reduce patterning time by preventing burr due to thin film materials in a patterning process. CONSTITUTION: A patterning unit(2) forms a separation unit to separate a thin film formed on a substrate into a plurality of parts. A support unit(3) is combined with a frame(1b) installed in a body(1a). The frame is upwardly extended from the body. A receiving groove(21) is formed on the patterning unit to receive thin film materials. A stage unit(5) supports the substrate. A transfer unit(6) transfers the stage unit or the support unit.</p>
申请公布号 KR101245141(B1) 申请公布日期 2013.03.19
申请号 KR20110079860 申请日期 2011.08.10
申请人 发明人
分类号 H01L31/18;H01L31/04;H01L31/042 主分类号 H01L31/18
代理机构 代理人
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