发明名称 |
SUPPORT DEVICE FOR LED SUBSTRATE |
摘要 |
PURPOSE: A substrate supporting device for manufacturing an LED is provided to uniformly transfer heat by flatly maintaining the supporting surface of a substrate irrespective of processing temperature. CONSTITUTION: A pocket(20) is formed in the upper side of a body. The pocket includes a flat bottom surface. A dummy substrate(30) is formed in the pocket. The dummy substrate has the same warpage as a process substrate. |
申请公布号 |
KR101245221(B1) |
申请公布日期 |
2013.03.19 |
申请号 |
KR20110098073 |
申请日期 |
2011.09.28 |
申请人 |
TOKAI CARBON KOREA CO., LTD. |
发明人 |
KIM, JOUNG IL |
分类号 |
H01L21/683;H01L21/205;H01L33/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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