发明名称 |
Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters |
摘要 |
The invention provides a process for coating workpieces by plasma-induced chemical vapor deposition, in which a process gas is introduced into a coating chamber and a plasma is ignited by electromagnetic energy in at least one region of the coating chamber which adjoins the workpiece and in which the process gas is present, wherein the coating operation is monitored on the basis of at least one measured spectral parameter of the plasma, and the workpiece is removed in the event of a deviation from a desired range for the parameter. |
申请公布号 |
US8397667(B2) |
申请公布日期 |
2013.03.19 |
申请号 |
US20050215163 |
申请日期 |
2005.08.30 |
申请人 |
BEHLE STEPHAN;LUEETTRINGHAUS-HENKEL ANDREAS;EIMANN PETER;KLEIN JUERGEN;SCHOTT AG |
发明人 |
BEHLE STEPHAN;LUEETTRINGHAUS-HENKEL ANDREAS;EIMANN PETER;KLEIN JUERGEN |
分类号 |
C23C16/00;C23F1/00;H01L21/306 |
主分类号 |
C23C16/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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