发明名称 Method of manufacturing a semiconductor device having a contact plug
摘要 There is provided a semiconductor device that includes: a transistor having a gate electrode, a source region, and a drain region; a first inter-layer insulation film covering the transistor; a first contact plug formed penetrating through the first inter-layer insulation film and connected to either the source region or the drain region; a second inter-layer insulation film covering the first contact plug; a groove extending in the second inter-layer insulation film in a same direction as an extending direction of the gate electrode and exposing a top surface of the first contact plug at a bottom thereof; a second contact plug connected to the first contact plug and formed in the groove; and a wiring pattern extending on the second inter-layer insulation film so as to traverse the groove and integrated with the second contact plug.
申请公布号 US8399930(B2) 申请公布日期 2013.03.19
申请号 US201213360850 申请日期 2012.01.30
申请人 MAEKAWA ATSUSHI;ELPIDA MEMORY, INC. 发明人 MAEKAWA ATSUSHI
分类号 H01L21/70 主分类号 H01L21/70
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