发明名称 Method of manufacturing nano device by arbitrarily printing nanowire devices thereon and intermediate building block useful for the method
摘要 A method of manufacturing a nano device by directly printing a plurality of NW devices in a desired shape on a predesigned gate substrate. The method includes preparing an NW solution, preparing a building block for performing decaling onto the substrate by carrying an NW device, forming the NW device by connecting electrodes of each of building block units of the building block using NWs by dropping the NW solution between the electrodes and then through dielectrophoresis, visually inspecting the numbers of NW bridges that are formed between the electrodes of each of the building block units through the dielectrophoresis, grouping the building block units according to the numbers, and decaling the NW device formed on each of the building block units onto the gate substrate by bringing the grouped building block units into contact with the predesigned gate substrate and then detaching the grouped building block units.
申请公布号 US8399334(B2) 申请公布日期 2013.03.19
申请号 US201113015286 申请日期 2011.01.27
申请人 MYOUNG JAE MIN;BAIK HONG KOO;LEE TAE IL;INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY 发明人 MYOUNG JAE MIN;BAIK HONG KOO;LEE TAE IL
分类号 H01L29/66;B82Y99/00;H01L21/20;H01L21/66 主分类号 H01L29/66
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