发明名称 ELECTROCHEMICAL ISOTHERMAL-CAPACITANCE-TRANSIENT SPECTROSCOPY
摘要 PURPOSE: EICTS(electrochemical-isothermal-transient spectroscopy) is provided to repeatedly measure the surface of a sample and to repeatedly perform electrochemical etching. CONSTITUTION: An electrochemical cell includes an electrolyte accommodating part(11), a sample mounting part(12) and electrodes(13). The electrolyte accommodating part accommodates an electrolyte solution. The electrolyte solution is used for etching a sample. The electrolyte accommodating part and the sample mounting part are made of Teflon, glass, and quartz. The electrodes are used for measuring reference potential.
申请公布号 KR101241755(B1) 申请公布日期 2013.03.15
申请号 KR20120079838 申请日期 2012.07.23
申请人 HOSEO UNIVERSITY ACADEMIC COOPERATION FOUNDATION 发明人 OH, DONG CHEOL
分类号 H01L21/66 主分类号 H01L21/66
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