MANUFACTURING APPARATUS OF NANO PARTICLE USING WHOLE CHAMBER AS COLLECTING DEVICE AND MANUFACTURING METHOD OF NANO PARTICLE

摘要

PURPOSE: An apparatus for preparing nanoparticles is provided to enhance the capturing efficiency of nanoparticles generated by sputtering. CONSTITUTION: An apparatus for preparing nanoparticles comprises a raw material supply unit and a nanopowder capturing unit. The raw material supply unit inputs a raw material for sputtering the nanopowder into a chamber. The nanopowder capturing unit is placed adjacent to the outlet of the raw material supply unit and prepares the nanopowder by vaporizing a raw material target(100). The nanopowder capturing unit comprises a chamber(500), a plasma forming unit(300), a ground(200), a vacuum forming unit(600), and a gas input unit(700). [Reference numerals] (AA) Rotation