COMBINED METHOD OF SECONDARY ION MASS SPECTROSCOPY AND ENERGY DISPERSIVE X-RAY FOR QUANTITATIVE CHEMICAL ANALYSIS OF VARIOUS SOLID MATERIALS AND THIN FILMS.

摘要

The present invention relates to a combined method of secondary ion mass spectroscopy (SIMS) and energy dispersed X-ray (EDX) for quantitative chemical analysis of solid materials and thin films, comprising the steps of a) installing a energy dispersed detector Si(Li) on a free port of a mass spectrometer for X-ray recording; b) placing the study sample in an ultra high vacuum (UHV) chamber of the mass spectrometer; c) activating the electron gun for the mass spectrometer to achieve the characteristic X-ray excitation of the study sample, wherein the electron gun provides a moderately focused electron beam with energies that can vary from 0 to 15keV and currents from 0 to 100 mA; d) analyzing the X-rays generated in step c) with the energy dispersed detector Si(Li), and find sensibility factors (RSF); e) calibrating the SIMS data with the sensitivity factors (RSF) obtained by EDX quantitative analysis of step d) using existing theories; and f) analyzing with SIMS any unknown material of the study sample.