发明名称 |
MASK MANAGEMENT SYSTEM AND METHOD FOR OLED ENCAPSULATION |
摘要 |
A system and method for encapsulating an organic light-emitting diode (OLED) device by enabling a substrate and a plurality of masks to be efficiently received into a vacuum processing environment, transferred between one or more process chambers for the deposition of encapsulating layers, and removed from the processing system. A method of encapsulating an organic light-emitting diode (OLED) device includes positioning one or more masks over a substrate to deposit encapsulating layers on an OLED device disposed on the substrate. A processing system for encapsulating an organic light-emitting diode (OLED) device includes one or more transfer chambers, one or more load lock chambers coupled to each transfer chamber and operable to receive a mask into a vacuum environment, and one or more process chambers coupled to each transfer chamber and operable to deposit an encapsulating layer on a substrate. |
申请公布号 |
WO2012174550(A3) |
申请公布日期 |
2013.03.14 |
申请号 |
WO2012US42988 |
申请日期 |
2012.06.18 |
申请人 |
APPLIED MATERIALS, INC.;KURITA, SHINICHI;KIM, BEOM SOO |
发明人 |
KURITA, SHINICHI;KIM, BEOM SOO |
分类号 |
H01L51/56;H05B33/04 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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