发明名称 GROUP 13 NITRIDE CRYSTAL AND SUBSTRATE THEREOF
摘要 A group 13 nitride crystal has a hexagonal crystal structure and at least contains nitrogen atom and at least a kind of metal atoms selected from a group consisting of B, Al, Ga, In, and Tl. The group 13 nitride crystal includes a first region located at an inner side of a cross section intersecting a c-axis, and a second region surrounding at least a part of an outer periphery of the first region, having a thickness larger than a maximum diameter of the first region, and having a carrier density higher than that of the first region.
申请公布号 US2013062660(A1) 申请公布日期 2013.03.14
申请号 US201213603678 申请日期 2012.09.05
申请人 HAYASHI MASAHIRO;SARAYAMA SEIJI;SATOH TAKASHI;NAMBU HIROSHI;KIMURA CHIHARU;MIYOSHI NAOYA;RICOH COMPANY, LTD. 发明人 HAYASHI MASAHIRO;SARAYAMA SEIJI;SATOH TAKASHI;NAMBU HIROSHI;KIMURA CHIHARU;MIYOSHI NAOYA
分类号 H01L33/32 主分类号 H01L33/32
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