发明名称 WIRELESS PROBE CARD VERIFICATION SYSTEM AND METHOD
摘要 A probe card assembly can include a wireless link to an external verifier (e.g., debugger). The wireless link can interface to a boundary scan interface of a controller on the probe card assembly. The wireless link can allow for verification of the probe card assembly while it is installed within a prober.
申请公布号 WO2012125606(A3) 申请公布日期 2013.03.14
申请号 WO2012US28869 申请日期 2012.03.13
申请人 FORMFACTOR, INC.;KANEKO, SUSUMU 发明人 KANEKO, SUSUMU
分类号 H01L21/66;G01R1/073 主分类号 H01L21/66
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