发明名称 |
WIRELESS PROBE CARD VERIFICATION SYSTEM AND METHOD |
摘要 |
A probe card assembly can include a wireless link to an external verifier (e.g., debugger). The wireless link can interface to a boundary scan interface of a controller on the probe card assembly. The wireless link can allow for verification of the probe card assembly while it is installed within a prober. |
申请公布号 |
WO2012125606(A3) |
申请公布日期 |
2013.03.14 |
申请号 |
WO2012US28869 |
申请日期 |
2012.03.13 |
申请人 |
FORMFACTOR, INC.;KANEKO, SUSUMU |
发明人 |
KANEKO, SUSUMU |
分类号 |
H01L21/66;G01R1/073 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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