SUPPORT STRUCTURE FOR WAFER TABLE

摘要

The invention relates to a support structure (1) for supporting a wafer table in a lithography system, said support structure comprising: a base (20) comprising a reference surface (40, 50), an interface member (30), made from a low thermal expansion ma¬ terial, arranged on top of said base and adapted for positioning said wafer table on the support structure, wherein said interface member is connected to said reference sur¬ face via at least one strut (60, 61, 66, 67), and wherein the at least one strut is made from a low thermal expansion material. The inven¬ tion further relates to a lithography system comprising such a support structure.