发明名称 PEELING DEVICE AND METHOD FOR PRODUCING ELECTRONIC DEVICE
摘要 <p>PURPOSE: A striping device and a method for manufacturing an electronic device are provided to prevent a substrate and a reinforcement plate in a striping process by successively striping an interface of the reinforcement plate and the substrate from one end to the other end. CONSTITUTION: A support unit(20) supports a first main surface(6b) of a laminate(6) including a substrate(2) and a reinforcement plate(3). A flexible plate(30) absorbs a second main surface(6a) of the laminate under vacuum. A plurality of movers(40) are separately arranged along the outside of the flexible plate. The plurality of movers are connected to a corresponding rod(60) through a corresponding connection device(50). A control device(80) controls the movement of the plurality of movers. A driving device(70) independently moves the plurality of movers.</p>
申请公布号 KR20130026997(A) 申请公布日期 2013.03.14
申请号 KR20120098663 申请日期 2012.09.06
申请人 ASAHI GLASS COMPANY LTD. 发明人 TAKIUCHI KEI;ITO YASUNORI;UTSUGI HIROSHI
分类号 H01L21/301;H01L21/02 主分类号 H01L21/301
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