| 摘要 |
<P>PROBLEM TO BE SOLVED: To carry a substrate into an exposure device efficiently. <P>SOLUTION: The method of carrying a substrate P<SB POS="POST">3</SB>into a liquid crystal exposure device includes the steps of: locating a fork hand 83 of a substrate carry-in device 80a that carries the substrate P<SB POS="POST">3</SB>for a substrate stage 20, capable of holding the substrate P<SB POS="POST">3</SB>in an exposure region, outside of the exposure region (upper region of a port 60); locating the substrate P<SB POS="POST">3</SB>, supported by the load hand 91b of an external carry-in robot 90b from below, above the fork hand 83; and transferring the substrate P<SB POS="POST">3</SB>, supported by the load hand 91b from below, from on the load hand 91b to above the fork hand 83. <P>COPYRIGHT: (C)2013,JPO&INPIT |
