| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the efficiency of the treatment of forming a coating C and the quality of the coating C to a high level. <P>SOLUTION: On the side surface of the box 3 of the apparatus, the first nozzle formation 33 that throttles a flow of a working gas is constituted by a double structure composed of an interior tube 35 and an outer tube 37. The first inner gas passage 39 is formed inside the interior tube 35, and the first annular outer gas passage 41 is formed between the outer peripheral surface of the interior tube 35 and the interior peripheral surface of the outer tube 37. The second nozzle formation 43 expanding a working gas and spraying is disposed concentrically at the tip of the outer tube 37, and the second gas passage 45 is formed inside the second nozzle formation 43. Two or more interior protrusions 47 and two or more outer protrusions 49 are formed at the tip of the interior tube 35 at intervals in the circumferential direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
