| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion source from which high-purity multivalent ions can be drawn out. <P>SOLUTION: An ion source 10 comprises: a target 12 which is ionized into electrons and cations to form plasma 14 when irradiated with laser 13; a first power source (for a first voltage E<SB POS="POST">1</SB>) for setting the electric potential of the target 12 to be higher than that of a cation emission target (i.e. an acceleration channel 18); and a second power source (for a second voltage E<SB POS="POST">2</SB>) for setting an electric potential (of a filter electrode 15) on a route for the cations to be higher than that of the target 12, provided that the route extends from the target 12 to the emission target (i.e. the acceleration channel 18). <P>COPYRIGHT: (C)2013,JPO&INPIT |
