GAS-SAMPLING DEVICE AND INSPECTION DEVICE

摘要

Provided is an inspection device that includes a gas-sampling device and a sensor for detecting a chemical substance contained in the gas sampled by the gas-sampling device. The gas-sampling device has: an air supply unit for forming an air curtain, covering a region in which a substance to be inspected is contained, and creating a space separated from the surrounding environment; a sampling unit for sampling the gas inside the separated space; and a dispersion gas supply unit for supplying gas to be dispersed in an amount at least equal to the amount sampled by the sampling unit. Therein, the sampling unit includes a plurality of sampling nozzles positioned in locations within the separated space that differ three-dimensionally from one another.