EPITAXIAL WAFER SUSCEPTOR AND SUPPORTIVE AND ROTATIONAL CONNECTION APPARATUS MATCHING THE SUSCEPTOR

摘要

Disclosed is an epitaxial wafer susceptor and a supportive and rotational connection apparatus matching the susceptor used for an MOCVD reaction chamber. The susceptor comprises a top surface and a susceptor rotating shaft protruding downward. A vertical driving shaft is coupled to the susceptor. The driving shaft comprises a counter bore inside an upper end of the driving shaft. At least a part of the susceptor rotating shaft is inserted into the counter bore if the susceptor is loaded. The susceptor is positioned and supported in the reaction chamber via coupling and connection between a contact surface of the susceptor rotating shaft and a corresponding contact surface of the counter bore. The susceptor is driven to rotate by the driving shaft if the driving shaft rotates. Reactant gases are introduced into the reaction chamber for an epitaxial reaction or a film deposition on the epitaxial wafers placed on the susceptor.