PHENOL-BASED SELF-CROSSLINKING POLYMER AND RESIST UNDERLAYER FILM COMPOSITION INCLUDING SAME

摘要

Disclosed are a phenol-based self-crosslinking polymer exhibiting a self-crosslinking reaction when heated even without an additive for hardening the polymer, and to a resist underlayer film composition including the phenol-based self-crosslinking polymer. The phenol-based self-crosslinking polymer is selected from the group consisting of a polymer represented by chemical formula 1, a polymer represented by chemical formula 2, and a polymer represented by chemical formula 3, which are set forth in the present description.