| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavefront measuring method and a program which can accurately derive wavefront information by using a windowed Fourier transform method even from fewer periodic patterns than used in a phase shifting method, and a wavefront measuring apparatus and an X-ray imaging apparatus using the same. <P>SOLUTION: A wavefront measuring apparatus includes optical elements 140, 150 forming a light periodic pattern by light from a light source, a detector 160 having plural pixels to detect the light from an optical element, and computing means 170 for computing, on the basis of detection results of the detector, wavefront information at positions in a wavefront of the light transmitted through a specimen, thereby obtaining information on the specimen. The computing means computes the wavefront information at one of the positions by using a result detected in a first pixel when detecting the first periodic pattern, a result detected in a second pixel when detecting the first periodic pattern, the second pixel being positioned within three pixels from the first pixel, and a result detected in the first pixel when detecting the second periodic pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT |
