| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mask frame capable of more surely preventing slack of a vapor deposition mask, and to provide a vapor deposition mask assembly using the same. <P>SOLUTION: The mask frame comprises a rectangular frame body composed of the high-thermal expansion alloy bars facing each other and the low-thermal expansion alloy bars facing each other. The linear expansion coefficient at 30-100°C of the former alloy bar, [α<SB POS="POST">Fh</SB>(30 to 100°C)] is (4 to 20)×10<SP POS="POST">-6</SP>/°C, and that of the latter alloy bar, [α<SB POS="POST">Fl</SB>(30 to 100°C)] is ≤5×10<SP POS="POST">-6</SP>/°C, and also α<SB POS="POST">Fh</SB>>α<SB POS="POST">Fl</SB>is satisfied. The latter alloy bar becomes a support member joining and supporting the vapor deposition mask. <P>COPYRIGHT: (C)2013,JPO&INPIT |
