| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer robot which can prevent the enlargement of a housing and the reduction of a cleaning degree, the housing, a semiconductor manufacturing method and a sorter device. <P>SOLUTION: A body of the transfer robot includes: a platy plate which is positioned so that its upper end is located below the lowest part of a first arm, and has a vertical face arranged with a fixing part for fixing the transfer robot so as to be vertical; an ascending/descending mechanism arranged at the vertical face; and a moving unit which rotatably supports the first arm and can ascend and descend on the vertical face by the ascending/descending mechanism. Furthermore, the lowest part of the first arm is made to approximate the body in such a degree that it does not contact with the upper end of the body. <P>COPYRIGHT: (C)2013,JPO&INPIT |
