发明名称 |
STRUCTURAL BODY AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE |
摘要 |
A structural body includes a sapphire underlying substrate; and a semiconductor layer of a group III nitride semiconductor disposed on the underlying substrate. An upper surface of the underlying substrate is a crystal surface tilted at an angle of 0.5° or larger and 4° or smaller with respect to a normal line of an a-plane which is orthogonal to an m-plane and belongs to a {11-20} plane group, from the m-plane which belongs to a {1-100} plane group.
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申请公布号 |
US2013062739(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201113577117 |
申请日期 |
2011.02.08 |
申请人 |
YAO TAKAFUMI;LEE HYUN-JAE;FUJII KATSUSHI;TAKAFUMI YAO |
发明人 |
YAO TAKAFUMI;LEE HYUN-JAE;FUJII KATSUSHI |
分类号 |
H01L21/20;H01L29/04 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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