| 摘要 |
Micro-miniaturized reed switches and methods of forming them are presented. The present invention enables cost-effective miniaturized reed switches with more consistent operating parameters as compared to conventional reed switches. The present invention employs lithographic-based high-aspect-ratio fabrication to enable monolithic construction of one or more reed switches, which enables reed switches having micrometer dimensions with tight tolerances that are repeatable over large arrays of devices. Reed switches in accordance with the present invention are capable of repeatable and consistent electromechanical operation.
|
