| 摘要 |
A process for manufacturing a transparent body for use in a touch panel is provided. The process includes: The process includes depositing a first transparent layer stack over a substrate with a first silicon - containing dielectric film, a second silicon - containing dielectric film, and a third silicon - containing dielectric film. The first and the third silicon - containing dielectric films have a low refractive index and the second silicon - containing dielectric film has a high refractive index. The process further includes depositing a transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order. At least one of the first silicon - containing dielectric film, the second silicon- containing dielectric film, the silicon - containing third dielectric film, or the transparent conductive film is deposited by sputtering from a target. Further thereto, a deposition apparatus (300) for manufacturing a transparent body for use in a touch panel and a transparent body for use in a touch panel are provided. |
