发明名称 SPUTTERING TARGET
摘要 <p>A sputtering target comprising a sintered object which comprises either indium oxide doped with Ga or indium oxide doped with Al and further contains a metal that has a positive valence of 4 in an amount of 100-1,100 at. ppm, excluding 100 at. ppm, of the sum of the Ga and indium or the sum of the Al and indium, and which has a crystal structure substantially constituted of a bixbyite structure of indium oxide.</p>
申请公布号 WO2013035335(A1) 申请公布日期 2013.03.14
申请号 WO2012JP05664 申请日期 2012.09.06
申请人 IDEMITSU KOSAN CO.,LTD.;EBATA, KAZUAKI;TOMAI, SHIGEKAZU;MATSUZAKI, SHIGEO;TSURUMA, YUKI 发明人 EBATA, KAZUAKI;TOMAI, SHIGEKAZU;MATSUZAKI, SHIGEO;TSURUMA, YUKI
分类号 C23C14/34;C04B35/00;H01L21/336;H01L21/363;H01L29/786 主分类号 C23C14/34
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