发明名称 METHOD FOR GENERATING CLUSTER
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for generating a cluster, which is used for directly generating a cluster of nano-sized core-shell structure without needing an inclusion from an optional solid material. <P>SOLUTION: A first laser 51 and a second laser 52 having the same pulse period are used. A first plume P1 is generated by irradiating a first target material 21 with the first laser 51. A second plume P2 is generated by irradiating a second target material 22 with the second laser 52 after the lapse of delay time Td from the time of the irradiation with the first laser 51. During the course of the delay time Td, a cluster C is generated in the first plume P1, and on which the second plume P2 is impinged. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013049911(A) 申请公布日期 2013.03.14
申请号 JP20110189463 申请日期 2011.08.31
申请人 HITACHI ZOSEN CORP;ADVANCED MATERIALS PROCESSING INSTITUTE KINKI JAPAN 发明人 TAKITANI TOSHIO;YOSHIDA TOSHIO;ODA KOJI;EGURI SHIGEO;YAMADA TAKESHI
分类号 C23C14/28;H01M4/90;H01M8/02 主分类号 C23C14/28
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