发明名称 RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS
摘要 A resonant structure and a method for fabricating the resonant structure each include a substrate that includes at least one cavity. The resonant structure and the method for fabricating the resonant structure also include a resonant material layer located and formed over the substrate and at least in-part covering the at least one cavity. The resonant structure may comprise a graphene resonator structure.
申请公布号 US2013062104(A1) 申请公布日期 2013.03.14
申请号 US201213606124 申请日期 2012.09.07
申请人 CRAIGHEAD HAROLD G.;PARPIA JEEVAK M.;MCEUEN PAUL;PARK JIWOONG;ALDEN JONATHAN S.;BARTON ROBERT A.;ILIC BOJAN R.;RUIZ-VARGAS CARLOS S.;VAN DER ZANDE AREND M.;CORNELL UNIVERSITY - CORNELL CENTER FOR TECHNOLOGY ENTERPRISE & COMMERCIALIZATION (CCTEC) 发明人 CRAIGHEAD HAROLD G.;PARPIA JEEVAK M.;MCEUEN PAUL;PARK JIWOONG;ALDEN JONATHAN S.;BARTON ROBERT A.;ILIC BOJAN R.;RUIZ-VARGAS CARLOS S.;VAN DER ZANDE AREND M.
分类号 B32B1/06;B05D5/00;B82Y40/00;H05K1/02;H05K1/11 主分类号 B32B1/06
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