发明名称 |
RESONANT MATERIAL LAYER APPARATUS, METHOD AND APPLICATIONS |
摘要 |
A resonant structure and a method for fabricating the resonant structure each include a substrate that includes at least one cavity. The resonant structure and the method for fabricating the resonant structure also include a resonant material layer located and formed over the substrate and at least in-part covering the at least one cavity. The resonant structure may comprise a graphene resonator structure.
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申请公布号 |
US2013062104(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201213606124 |
申请日期 |
2012.09.07 |
申请人 |
CRAIGHEAD HAROLD G.;PARPIA JEEVAK M.;MCEUEN PAUL;PARK JIWOONG;ALDEN JONATHAN S.;BARTON ROBERT A.;ILIC BOJAN R.;RUIZ-VARGAS CARLOS S.;VAN DER ZANDE AREND M.;CORNELL UNIVERSITY - CORNELL CENTER FOR TECHNOLOGY ENTERPRISE & COMMERCIALIZATION (CCTEC) |
发明人 |
CRAIGHEAD HAROLD G.;PARPIA JEEVAK M.;MCEUEN PAUL;PARK JIWOONG;ALDEN JONATHAN S.;BARTON ROBERT A.;ILIC BOJAN R.;RUIZ-VARGAS CARLOS S.;VAN DER ZANDE AREND M. |
分类号 |
B32B1/06;B05D5/00;B82Y40/00;H05K1/02;H05K1/11 |
主分类号 |
B32B1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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