发明名称 |
PELLICLE FOR LITHOGRAPHY AND A METHOD OF MAKING THEREOF |
摘要 |
A pellicle is proposed wherein the mask-bonding agglutinant layer coated on one annular face of the pellicle frame is designed to have a cross-section which is trapezoidal (including the case of rectangle) so that the angle alpha (α) included between the side wall of the agglutinant layer and said annular face is 90 degrees or smaller.
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申请公布号 |
US2013065164(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201213606162 |
申请日期 |
2012.09.07 |
申请人 |
NAGATA YOSHIHIKO;SHIN-ETSU CHEMICAL CO., LTD. |
发明人 |
NAGATA YOSHIHIKO |
分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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