MAGNETIC FIELD SENSING ELEMENT COMBINING A CIRCULAR VERTICAL HALL MAGNETIC FIELD SENSING ELEMENT WITH A PLANAR HALL ELEMENT

摘要

A magnetic field sensor includes a circular vertical Hall (CVH) sensing element and at least one planar Hall element. The CVH sensing element has contacts arranged over a common implant region in a substrate. In some embodiments, the at least one planar Hall element is formed as a circular planar Hall (CPH) sensing element also having contacts disposed over the common implant region. A CPH sensing element and a method of fabricating the CPH sensing element are separately described.