GLASS DEPOSITION APPARATUS FOR FLAT DISPLAY

摘要

PURPOSE: A thin film depositing device for a flat display is provided to improve stability and productivity by inserting a new shield into a chamber after the used shield is withdrawn to the outside of the chamber through an inlet and outlet unit for supporting the shield. CONSTITUTION: A chamber(110) provides a space for depositing a substrate for a flat display. A shield(120) prevents deposition materials from being deposited on an inner wall of the chamber. An inlet and outlet unit(130) for supporting the shield inputs and outputs the shield to and from the chamber to replace the shield, and includes a gate door(131), a shield support member(132) to support the shield, and a door moving unit(133) to move the gate door. The door moving unit includes a sliding rail(134) and a roller(135) to move along the sliding rail.