| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for film formation by which a laminate can be efficiently produced, the laminate on which vacuum film formation is applied to both sides by suitably performing heating treatment or the like using a simple device constitution, and a laminate obtainable by the method. <P>SOLUTION: The film formation method comprises the steps of: unrolling and feeding an elongated substrate wound in a roll form from a first roll chamber in a direction from the first roll chamber toward a second roll chamber, using a first surface as a surface for film formation; degassing the fed substrate; forming a first material film on the first surface of the degassed substrate in a first film formation chamber; forming a second material film on the first material film in a second film formation chamber; taking up the substrate in a roll form in the second roll chamber, the substrate having the material films formed thereon; unrolling and feeding the taken up substrate from the first roll chamber in the direction, using a second surface opposite the first surface of the substrate as a surface for film formation; and repeating all the above treatments. <P>COPYRIGHT: (C)2013,JPO&INPIT |
