| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an alkali solubility improving agent for a resist, with which solubility of a resist with an alkali upon alkali development can be improved by adding the agent to an alkali-soluble resin for a resist. <P>SOLUTION: The alkali solubility improving agent for a resist comprises a rosin derivative (A), which includes acrylopimaric acid (a-1) and dihydroacrylopimaric acid (a-2) by 20 to 80 wt.% and contains the dihydroacrylopimaric acid (a-2) at least by 5 wt.%, and which has an acid value of 200 or more and a softening point of 110°C or higher. <P>COPYRIGHT: (C)2013,JPO&INPIT |
