发明名称 |
METHODS FOR DEPOSITING METAL-POLYMER COMPOSITE MATERIALS ATOP A SUBSTRATE |
摘要 |
Methods for depositing metal-polymer composite materials atop a substrate are provided herein. In some embodiments, a method of depositing a metal-polymer composite material atop a substrate disposed in a hot wire chemical vapor deposition (HWCVD) chamber may include flowing a current through a plurality of filaments disposed in the HWCVD chamber, the filaments comprising a metal to be deposited atop a substrate; providing a process gas comprising an initiator and a monomer to the HWCVD chamber; and depositing a metal-polymer composite material on the substrate using species decomposed from the process gas and metal atoms ejected from the plurality of filaments.
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申请公布号 |
US2013065401(A1) |
申请公布日期 |
2013.03.14 |
申请号 |
US201213608172 |
申请日期 |
2012.09.10 |
申请人 |
CHATTERJEE SUKTI;CHATTERJEE AMIT;APPLIED MATERIALS, INC. |
发明人 |
CHATTERJEE SUKTI;CHATTERJEE AMIT |
分类号 |
H01L21/30 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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