SOFT COLLISION GRATING SCALE AND MEASURING METHOD THEREOF

摘要

Provided are a soft collision grating scale and a measuring method thereof; the soft collision grating scale comprises a fixed main scale (10), a sliding secondary scale (20) and a movable measuring head (30), with the sliding secondary scale (20) being arranged slidably with respect to the fixed main scale (10), the movable measuring head (30) being able to synchronously move along with the sliding secondary scale (20), and the movable measuring head (30) being arranged slidably with respect to the sliding secondary scale (20), and with a buffering mechanism (50) being arranged for the movable measuring head (30). On this basis, by means of arranging the movable measuring head (30) slidably with respect to the sliding secondary scale (20) and utilizing the buffering effect of the buffering mechanism (50) on the movable measuring head (30) in a coordinated manner, upon collision with a first blocking face (41) or a second blocking face (42) of an object to be measured, the movable measuring head (30) is enabled to automatically obtain a reversed compensation effect to achieve a soft collision result, which on one hand avoids effectively damage to the movable measuring head (30), ensuring the measuring operation proceeds normally, and on the other hand precludes bounce back of the sliding secondary scale (20); secondly, by utilizing the reversed movement of the movable measuring head (30) with respect to the sliding secondary scale (20), a compensation distance can be obtained and the value of the compensation distance measured so as to improve the accuracy of the measurement.