| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tank carrier which moves a processing part with multiple substrates and thereby reducing the used amount of a fluid. <P>SOLUTION: A tank carrier 1, in which multiple substrates W are supported by a supporting member 11 in a housing 3, is moved to a desired processing part. Then, a process liquid is supplied to the housing 3 and thereby causing the tank carrier 1 to perform the process on the multiple substrates W. Thus, a supply amount of the process liquid can be reduced. Consequently, the used amount of the process liquid required for the process can be reduced. Further, the number of deliveries of the substrates W can be reduced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
