| 摘要 |
<P>PROBLEM TO BE SOLVED: To restrain abrasion of a pointed end of an electrode rod using a simple structure, for example, so that the pointed end of the electrode rod becomes like a flower-blooming condition. <P>SOLUTION: A tip end of an electrode rod 40, at which a conical pointed end 41 is located, is arranged in an inner space of an insert chip 10, and the electrode rod is positioned coaxially to a nozzle 11 of the insert chip by a centering stone 30 inserted in the insert chip. Plasma gas is supplied to the nozzle through a vertical groove 31 or a vertical hole 31a on an outer periphery of the centering stone. A bottom end of the centering stone 30 is made to not less than a conical pointed end 41 of the electrode rod 40, and plasma gas passages 17, 18/19/19a for guiding plasma gas emitted from a bottom end of the centering stone downward at a foremost end of the pointed end 41 are formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
