发明名称 METHOD FOR MAKING A CURRENT-PERPENDICULAR-TO-THE-PLANE (CPP) MAGNETORESISTIVE (MR) SENSOR WITH AN ANTIPARALLEL FREE (APF) STRUCTURE FORMED OF AN ALLOY REQUIRING POST-DEPOSITION HIGH TEMPERATURE ANNEALING
摘要 A method for making a current-perpendicular-to-the plane magnetoresistive (CPP-MR) sensor with an antiparallel-free APF structure having the first free layer (FL1) formed of an alloy, like a Heusler alloy, that requires high-temperature or extended-time post-deposition annealing includes the step of annealing the Heusler alloy material before deposition of the antiparallel coupling layer (APC) of the APF structure. In a modification to the method, a protection layer, for example, a layer of Ru, Ta, Ti, Al, CoFe, CoFeB or NiFe, may deposited on the layer of Heusler alloy material prior to annealing, and then etched away to expose the underlying Heusler alloy layer as FL1.
申请公布号 US2013064971(A1) 申请公布日期 2013.03.14
申请号 US201113231608 申请日期 2011.09.13
申请人 CAREY MATTHEW J.;CHANDRASHEKARIAIH SHEKAR B.;CHILDRESS JEFFREY R.;CHOI YOUNG-SUK 发明人 CAREY MATTHEW J.;CHANDRASHEKARIAIH SHEKAR B.;CHILDRESS JEFFREY R.;CHOI YOUNG-SUK
分类号 B05D5/00;B05D1/38;B05D3/02;B05D5/12 主分类号 B05D5/00
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