发明名称 SHAPE MEASUREMENT DEVICE, STRUCTURE MANUFACTURING SYSTEM, SHAPE MEASUREMENT METHOD, STRUCTURE MANUFACTURING METHOD, SHAPE MEASUREMENT PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM
摘要 An objective of the present invention is to assess whether blurring is present in a captured image for measuring a subject shape to be measured. A shape measurement device comprises: an image capture unit which generates a captured image which captures the subject to be measured; an illumination unit which shines upon the subject to be measured an illumination light which has a prescribed intensity distribution from a direction different form the direction which the image capture unit captures the image such that the image which is captured by the image capture unit is captured as an image in which a lattice pattern is projected upon the subject to be measured; a feature value computation unit which computes a feature value from the captured image which denotes the degree of blurring which is present in the captured image; and an assessment unit which assesses whether blurring is present in the captured image on the basis of the feature value.
申请公布号 WO2013035847(A1) 申请公布日期 2013.03.14
申请号 WO2012JP72913 申请日期 2012.09.07
申请人 NIKON CORPORATION;AOKI, HIROSHI 发明人 AOKI, HIROSHI
分类号 G01B11/25;G06T1/00 主分类号 G01B11/25
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