发明名称 ACTIVE-MATRIX DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To form an active-matrix display device with reduced manufacturing steps. <P>SOLUTION: A method of manufacturing an active-matrix display device comprises the step of sequentially forming a gate electrode layer, a first insulating film, an oxide semiconductor layer, a second insulating film, a source/drain electrode electrically connected to the oxide semiconductor layer, on an insulating substrate. The oxide semiconductor layer is formed over a pixel region from a region in which the source/drain electrode is formed, and a portion of the oxide semiconductor layer equivalent to the pixel region is subjected to low-resistance treatment to form a first pixel electrode, before forming the second insulating film. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013051328(A) 申请公布日期 2013.03.14
申请号 JP20110189028 申请日期 2011.08.31
申请人 JAPAN DISPLAY CENTRAL CO LTD 发明人 ISHIDA ARICHIKA;HIRAMATSU MASAHITO;MATSUURA YUKI
分类号 H01L29/786;G02F1/1343;G02F1/1368 主分类号 H01L29/786
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