摘要 |
<P>PROBLEM TO BE SOLVED: To form an active-matrix display device with reduced manufacturing steps. <P>SOLUTION: A method of manufacturing an active-matrix display device comprises the step of sequentially forming a gate electrode layer, a first insulating film, an oxide semiconductor layer, a second insulating film, a source/drain electrode electrically connected to the oxide semiconductor layer, on an insulating substrate. The oxide semiconductor layer is formed over a pixel region from a region in which the source/drain electrode is formed, and a portion of the oxide semiconductor layer equivalent to the pixel region is subjected to low-resistance treatment to form a first pixel electrode, before forming the second insulating film. <P>COPYRIGHT: (C)2013,JPO&INPIT |