OBJECT CARRYING-OUT SYSTEM, EXPOSURE DEVICE, METHOD FOR MANUFACTURING FLAT PANEL DISPLAY, METHOD FOR MANUFACTURING DEVICE, AND METHOD FOR CARRYING OUT OBJECT

摘要

PROBLEM TO BE SOLVED: To quickly carry out an object held by an object holder.

SOLUTION: A method for carrying out a substrate P for carrying out the substrate P placed on the upper face of a substrate holder 30, from the substrate holder 30 includes: causing a substrate tray 60 that has been held by the substrate holder 30 in advance, to support the substrate P from the lower part; causing the substrate tray 60 to adsorbingly hold the substrate P; jetting out gas from the substrate holder 30 towards the substrate P; and carrying out the substrate P from the substrate holder 30 by relatively moving the substrate tray 60 along the direction parallel to the upper face of the substrate holder 30, in a state where the substrate P is adsorbedly held by the substrate tray 60 and the gas is jetted out to the substrate P.

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