发明名称 SURFACE COATINGS
摘要 A plasma chamber for coating a substrate with a polymer layer, the plasma chamber comprises a first electrode set and a second electrode set, the first and second electrode sets are arranged either side of a sample chamber for receiving a substrate, wherein the first and second electrode sets comprise plural electrode layers and wherein each electrode set comprises plural radiofrequency electrode layers or plural ground electrode layers for coating polymer to each surface of a substrate.
申请公布号 WO2013034920(A2) 申请公布日期 2013.03.14
申请号 WO2012GB52201 申请日期 2012.09.07
申请人 EUROPLASMA NV;LEGEIN, FILIP;FERDINANDI, FRANK 发明人 LEGEIN, FILIP;FERDINANDI, FRANK
分类号 H01J37/32 主分类号 H01J37/32
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