发明名称 VACUUM DRY APPARATUS
摘要 <p>PURPOSE: A vacuum drying device is provided to improve the reliability of a vacuum drying process by preventing a sealing unit from being damaged due to a support pin. CONSTITUTION: A housing(120) is installed in a body(110). A chamber is installed in the housing to load and dry an object(50). The housing is comprised of a top housing(125) and a bottom housing(121) which are fixed to a body. A plurality of support pins support the object loaded in the chamber. A pumping unit decompresses the chamber in a vacuum state. A sealing unit seals a part of the housing through which the support pin passes.</p>
申请公布号 KR20130026945(A) 申请公布日期 2013.03.14
申请号 KR20110090415 申请日期 2011.09.06
申请人 TERASEMICON CORPORATION 发明人 JEON, YOUNG JUN;LEE, MIN CHUL
分类号 H01L21/302;H01L21/027 主分类号 H01L21/302
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